- Oggetto:
Multi-Elemental Ion Implanter (Impiantatore ionico dipartimentale)
- Categoria
- Grandi attrezzature di ricerca
- Descrizione
The Solid State Physics laboratory is equipped with a state-of-the-art multi-elemental ion implanter funded within the framework of the Departments of Excellence program (L. 232/2016) funded by the Italian Ministry of University and Research (MUR).
The principal technical characteristics of the apparatus are summarized as follows:
- max terminal potential: 100 kV
- ion source: NEC - SNICS II
- ion species tested so far: H, C, O, Mg, Si, MnO, Pb, Sn
- beamlines: 0o (currently operational), 20o (currently not operational)
- typical ion beam current range: 10-12 - 10-6 A (depending upon ion type and charge state)
- typical ion beam size: 1 cm2 (depending upon ion species and charge state)
- <href=" photo="" photo_3="">irradiation chamber: localized within the cleanroom facility</href=">
- radiation safety: Radiation protection in all regards is ensured by University Torino.
The facility is designed to operate within the following applicative frameworks:
- materials modification: tribology, optical effects
- devices functional characterization: IBIC
- quantum technologies: controlled implantation (down to the single ion level) of specific impurities for the engineering of optically active defects in wide bandgap materials; for further information: see Diamond science page of the "Diamond Research" and relevant quantum-optical characterization techniques ;
- semiconductor processing
The access to the facility is controlled under the current national laws regulating radio-protection.
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Contacts
If you are interested in further exploring this experimental capabilities of this facility, please contact Ettore Vittone.
- Stato
- In uso
- Responsabile
- Paolo Olivero
- Tel: 011 670 7366
- Email: paolo.olivero@unito.it
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